School of Materials Science and Engineering, Anhui University of Science and Technology, Huainan, Anhui 232001, P. R. China ...

Abstract: This paper reports a new MEMS temperature sensor based on piezoelectric membrane resonator for temperature measurement and compensation applications. For the first time, it theoretically ...

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Abstract: In this work, a highly linear temperature sensor based on a silicon carbide (SiC) p-n diode is presented. Under a constant current biasing, the diode has an excellent linear response to the ...