Abstract: Making full use of the availability and excellent performance of silicon carbide (SiC) substrates, SiC-based MEMS piezoresistive pressure sensors have been extensively investigated. In this ...
Abstract: We present a grid-type MEMS capacitive pressure sensor fabricated using a 0.18 μm 1P6M CMOS processes combined with a surface micromachining technique. The innovative grid-type sensor design ...
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