Abstract: We present a grid-type MEMS capacitive pressure sensor fabricated using a 0.18 μm 1P6M CMOS processes combined with a surface micromachining technique. The innovative grid-type sensor design ...
Infleqtion, a global leader in neutral atom-based quantum technology, today announced a strategic partnership with Silicon Light Machines, a micro-electro-mechanical systems (MEMS) innovator based in ...
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