Abstract: Processing errors can result in an asymmetric stiffness distribution within the micro-electromechanical systems (MEMS) disk resonator gyroscope (DRG), leading to mode mismatching and a ...
OÌ…mura Satoshi Memorial Institute, Kitasato University5-9-1 Shirokane, Minato-ku, Tokyo 108-8641, Japan Graduate School of Infection Control Sciences, Kitasato University, 5-9-1 Shirokane, Minato-ku, ...