C&EN

High-Accuracy Prediction of ScAlN Thin Film Dry Etching Using Machine Learning Driven Regression Modeling

Optical Science & Engineering, The University of New Mexico, Albuquerque, New Mexico 87131, United States Center for High Tech Technology Materials (CHTM), Albuquerque, New Mexico 87106, United States ...
IEEE

Wet Etching Process Optimization and Consistency Enhancement of Massive Through Glass Vias Through Laser-Induced Wet Etching

Abstract: Through glass via (TGV) technology presents a promising alternative for 3-D vertical interconnects in advanced packaging. As device integration progresses, the number of through vias in ...