Abstract: The lifetimes of metal-insulator-metal (MIM) capacitors are predicted from voltage step stress data. Capacitor areas of 400, 5625 and 11250 /spl mu/m/sup 2/ are investigated. The reliability ...
Abstract: In this letter, a new sensor, theory, methodology, and experimental results of dielectric constant characterization of several planar samples under test (SUT) are presented. Each SUT is ...